Description
Integration of Functional Oxides with Semiconductors, Softcover reprint of the original 1st ed. 2014
Language: EnglishSupport: Print on demand
Publication date: 02-2014
278 p. · 15.5x23.5 cm · Hardback
Description
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Introduction.- Critical issues in Oxide-Semiconductor Heteroepitaxy.- Predictive Engineering of Semiconductor-Oxide Interfaces.- Crystalline Functional Oxide Growth Methods.- Thin Oxide Film Characterization Methods.- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy.- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates.- Other Epitaxial Oxides on Semiconductors.- Outlook and Parting Thoughts.- Appendices.
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