Silicon-On-Insulator (SOI) Technology
Manufacture and Applications
Woodhead Publishing Series in Electronic and Optical Materials Series

Silicon-On-Insulator (SOI) Technology: Manufacture and Applications covers SOI transistors and circuits, manufacture, and reliability. The book also looks at applications such as memory, power devices, and photonics.

The book is divided into two parts; part one covers SOI materials and manufacture, while part two covers SOI devices and applications. The book begins with chapters that introduce techniques for manufacturing SOI wafer technology, the electrical properties of advanced SOI materials, and modeling short-channel SOI semiconductor transistors. Both partially depleted and fully depleted SOI technologies are considered. Chapters 6 and 7 concern junctionless and fin-on-oxide field effect transistors. The challenges of variability and electrostatic discharge in CMOS devices are also addressed. Part two covers recent and established technologies. These include SOI transistors for radio frequency applications, SOI CMOS circuits for ultralow-power applications, and improving device performance by using 3D integration of SOI integrated circuits. Finally, chapters 13 and 14 consider SOI technology for photonic integrated circuits and for micro-electromechanical systems and nano-electromechanical sensors.

The extensive coverage provided by Silicon-On-Insulator (SOI) Technology makes the book a central resource for those working in the semiconductor industry, for circuit design engineers, and for academics. It is also important for electrical engineers in the automotive and consumer electronics sectors.

Part I: Silicon-on-insulator (SOI) materials and manufacture1. Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology2. Characterization of the electrical properties of advanced silicon-on-insulator (SOI) materials and transistors3. Modeling the performance of short-channel fully depleted silicon-on-insulator (SOI) metal oxide semiconductor field effect transistors (MOSFETs)4. Partially depleted (PD) silicon-on-insulator (SOI) technology: circuit solutions5. Planar fully depleted (FD) silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) technology6. Silicon-on-insulator (SOI) junctionless transistors7. Silicon-on-insulator (SOI) fin-on-oxide field effect transistors (FinFETs)8. Understanding variability in complementary metal oxide semiconductor (CMOS) devices manufactured using silicon-on-insulator (SOI) technology9. Protecting against electrostatic discharge (ESD) in complementary metal oxide semiconductor (CMOS) integrated circuits (ICs) manufactured using silicon-on-insulator (SOI) technology

Part II: Silicon-on-insulator (SOI) devices and applications 10. Silicon-on-insulator (SOI) metal oxide semiconductor field effect transistors (MOSFETs) for radio frequency (RF) and analogue applications11. Silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) circuits for ultralow power (ULP) applications12. 3D integration of silicon-on-insulator (SOI) integrated circuits (ICs) for improved performance13. Silicon-on-insulator (SOI) technology for photonic integrated circuits (PICs)14. Silicon-on-insulator (SOI) technology for micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS) sensors

The extensive coverage provided by Silicon-on-insulator (SOI) technology makes it a central resource for those working in the semiconductor industry, for circuit design engineers and for academics. It is also important for electrical engineers in the automotive and consumer electronics sectors.

• Covers SOI transistors and circuits, as well as manufacturing processes and reliability
• Looks at applications such as memory, power devices, and photonics