Low-Pressure Synthetic Diamond, Softcover reprint of the original 1st ed. 1998
Manufacturing and Applications
Coll. Springer Series in Materials Processing

A comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.

I Introduction.- 1. CVD Diamond: A New and Promising Material.- 1.1 Introduction.- 1.2 New Horizons in Diamond Synthesis.- 1.3 Economics: Low Price via Low-Pressure Diamond Deposition?.- 1.4 Conclusions and Outlook.- References.- II Methods of CVD-Diamond Production.- 2. Microwave-Plasma Deposition of Diamond.- 2.1 Introduction.- 2.2 Fundamentals of Microwave-Plasma Discharges.- 2.3 Types of Micro wave-Plasma Reactors.- 2.4 Commercial Applications of MPECVD Diamond.- 2.5 Economics of Diamond Deposition.- 2.6 Conclusions.- References.- 3. Combustion Flame Deposition of Diamond.- 3.1 Introduction.- 3.2 Invention: The Welding Torch.- 3.3 Implementation: The Flat-Flame Burner.- 3.4 Deposition Chemistry.- 3.5 Applications.- 3.6 Conclusions.- References.- 4. Plasma-Jet Deposition of Diamond.- 4.1 Introduction.- 4.2 Plasma Jet Principles.- 4.3 Summary.- References.- 5. Hot-Filament Deposition of Diamond.- 5.1 Introduction.- 5.2 Process Variants of Diamond HFCVD.- 5.3 Application Aspects of Diamond HFCVD.- 5.4 Conclusions.- References.- 6. Low-Temperature Diamond Deposition.- 6.1 Introduction.- 6.2 Substrate Heating by Plasma.- 6.3 Low-Pressure Plasma CVD.- 6.4 Forced Cooling and Measurement of Temperature.- 6.5 Nucleation at Low Temperature.- 6.6 Film Properties.- 6.7 Growth Rates at Low Temperature.- 6.8 Diamond Coating on Polymer.- 6.9 Future Prospects.- References.- 7. Other CVD Methods for Diamond Production.- 7.1 Introduction.- 7.2 Halogens in Diamond CVD.- 7.3 Laser-Assisted Diamond Synthesis.- 7.4 Hydrothermal Growth.- 7.5 Summary.- References.- 8. Heteroepitaxy and Highly Oriented Diamond Deposition.- 8.1 Introduction.- 8.2 Heteroepitaxy and Highly Oriented Diamond on Various Substrates.- 8.3 Nucleation and Initial Growth on SiC and Si.- 8.4 Selective Growth and Surface Morphology.- 8.5 Electrical Properties of Heteroepitaxial Diamonds.- 8.6 Conclusions.- References.- III Applications of CVD Diamond.- 9. Thermal Properties and Applications of CVD Diamond.- 9.1 Introduction.- 9.2 The Thermal Conductivity of Crystalline Insulators: the Klemens-Callaway Theory.- 9.3 Phonon Scattering Mechanisms in CVD Diamond.- 9.4 Methods for the Measurement of the Thermal Conductivity or Diffusivity of Diamond.- 9.5 CVD Diamond for Thermal Management Applications.- 9.6 Summary.- References.- 10. CVD Diamond for Optical Windows.- 10.1 Introduction.- 10.2 CVD Diamond as an Infrared Material.- 10.3 The Performance of CVD-Diamond Windows.- 10.4 The Preparation of CVD-Diamond Windows.- 10.5 Summary.- References.- 11. CVD Diamond for X-ray Windows and Lithography Mask Membranes.- 11.1 Introduction.- 11.2 CVD-Diamond Windows for X-ray Detectors.- 11.3 CVD-Diamond Windows for X-ray Tubes.- 11.4 CVD-Diamond X-ray Lithography Membranes.- 11.5 Summary and Outlook.- References.- 12. CVD Diamond for Cutting Tools.- 12.1 Introduction.- 12.2 Composite Tools for Wear Applications.- 12.3 Reproducibility and Economie Mass Production.- 12.4 CVD-Diamond Tools: Technological Performance.- 12.5 Conclusions.- References.- 13. CVD-Diamond Sensors for Temperature and Pressure.- 13.1 Introduction.- 13.2 Diamond Sensor Technology.- 13.3 Diamond Temperature Sensors.- 13.4 Piezoresistive Diamond Sensors.- 13.5 Summary.- References.- 14. CVD Diamond for Surface Acoustic Wave Filters.- 14.1 Introduction.- 14.2 SAW Materials and Communications.- 14.3 The Diamond Wafer Technology and SAW Filter Fabrication Process.- 14.4 Theoretical Results for Various Structures.- 14.5 Features of Diamond SAW and Its Applications.- 14.6 Summary.- References.- 15. Electron Emission from CVD-Diamond Cold Cathodes.- 15.1 Introduction.- 15.2 Electron Affinity and Negative Electron Affinity.- 15.3 Field Emission.- 15.4 Conclusions.- References.- 16. CVD Diamond for Ultraviolet and Particle Detectors.- 16.1 Introduction.- 16.2 UV Detectors.- 16.3 Particle and High-Energy Radiation Detectors.- 16.4 Concluding Remarks.- References.- 17. Electronic Devices on CVD Diamond.- 17.1 Introduction.- 17.2 Growth of Active Diamond Layers.- 17.3 Contacts to Diamond.- 17.4 Diamond Diodes.- 17.5 Characterization of Schottky Diodes.- 17.6 High-Temperature Schottky Diodes.- 17.7 Transistors.- 17.8 Conclusions.- References.- IV Outlook.- 18. CVD Diamond in the 21st Century.- 18.1 Introduction.- 18.2 CVD-Diamond Tooling.- 18.3 Optical Components.- 18.4 Thermal Management.- 18.5 Electronic Devices.- 18.6 Trends in Growth Technologies and Costs.- 18.7 Market Perspectives.- 18.8 Conclusions.- References.