Description
Photopolymers
Photoresist Materials, Processes, and Applications
Optics and Photonics Series
Language: EnglishSubjects for Photopolymers:
Keywords
Propylene Glycolmethyletheracetate; Holographic Photopolymer; HC CH2; Photo Acid Generator; Photoacid Generators; Cationic Polymerization; Oa Ti; Radical Polymerization; Ar Bo; Photopolymer; Uo Ro; CH3 H2; Cr Yl; Immersion Lithography; Ene Thiol Reaction; H2C CH; Dichromated Gelatin; UV Irradiation; Thermal Nanoimprint; Diffraction Efficiency; Pe Nt; Nanoimprint Processes; Ep Ox; Typical Organic Materials; Double Patterning; Ethylene Glycoldimethacrylate; Trifluoromethane Sulfonic Acid; Space S1; Coated Si Wafer; Cleaned Si Wafer
400 p. · 15.6x23.4 cm · Paperback
Description
/li>Contents
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/li>Biography
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Advancements in photopolymers have led to groundbreaking achievements in the electronics, print, optical engineering, and medical fields. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, printing plates, 3-D printing, microelectromechanical systems (MEMS), and medical materials. Processes such as photopolymerization, photodegradation, and photocrosslinking, as well as lithography technology in which photofabrications are performed by images of photopolymers, have given rise to very large-scale integrated (VLSI) circuits, microproducts, and more.
Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, Photopolymers: Photoresist Materials, Processes, and Applications covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world?s largest corporations. Offering a state-of-the-art review of progress in the development of photopolymers, this book provides valuable insight into current and future opportunities for photopolymer use.
Introduction. Basic Idea of Photopolymerization. Chemically Amplified Resists. Process of Chemically Amplified Resists. Nanoimprinting. Industrial Applications of Photopolymers. References.
Kenichiro Nakamura graduated from Kanazawa University, Japan in 1963 and from the University of Tokyo, Japan in 1968 with his doctorate in engineering. He conducted his postdoctoral fellowship at the University of Texas at Austin, USA in 1968–1970. His experience also includes working for Prof. Albert Noyes in photochemistry; holding the positions of associate professor (1970–1978), professor (1978–2010), and honorary professor (2010–present) at Tokai University, Japan; and serving as editor-in-chief of the Journal of Photopolymer Science and Technology (1998–present). In addition to books, his work has been published in many prestigious journals.
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