Precision Sensors, Actuators and Systems, 1992
Solid Mechanics and Its Applications Series, Vol. 17

Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life.
This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc.
These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.

New actuators for High-Precision Micro Systems.- 1. Introduction.- 2. Principle of Electrostatic Micro Actuator.- 3. Modeling and Dynamics of 3 DOF Electrostatic Micro Actuator.- 4. Control Method of 3 DOF Electrostatic Micro Actuator.- 5. Position Control Simulation of 3 DOF Electrostatic Micro Actuator.- 6. Structure of Prototype 3 DOF Electrostatic Micro Actuator.- 7. Experimental Results of Controlling 3 DOF Electrostatic Micro Actuator.- 8. Design and Structure of 6 DOF Electrostatic Micro Actuator.- 9. Control of 6 DOF Electrostatic Micro Actuator.- 10. Experimental Results of Controlling 6 DOF Electrostatic Micro Actuator.- 11. Optical Actuator.- 12. Conclusions.- Micro Structures and Micro Actuators for Implementing Sub-Millimeter Robots.- 1. Introduction.- 2. Three Dimensional Micro-Mechanical Structures.- 3. Electrostatic Actuation.- 4. Fluid Bearings for Platform Levitation.- 5. Mobile Micro Robots in Fluids.- 6. Prototype for a Mobile Micro-Robot in a Liquid.- 7. Summary.- Design, Modeling, and Control Strategies of a Three Degrees-of-Freedom VR Spherical Motor Part I: Reluctance Force Characterization.- 1. Introduction.- 2. Description of the VR Spherical Motor.- 3. The Variable Reluctance Model.- 4. Magnetic Flux Prediction Using Finite Element (FE) Method.- 5. Results and Discussions.- 6. Conclusions.- • Appendix: Overlapping Area Between Two Poles.- Design, Modeling, and Control Strategies of a Three Degrees-of-Freedom VR Spherical MotorPart II: Dynamic Modeling and Control.- 1. Introduction.- 2. Dynamic Model.- 3. Motion Control Strategy.- 4. Implementation of Inverse Model.- 5. Conclusions.- Micromachining of Piezoelectric Microsensors and Microactuators for Robotics Applications.- 1. Introduction.- 2. Thin Film Deposition, Processing, andProperties.- 3. Circuit Integration.- 4. Microsensor Applications.- 5. Microactuator Applications.- 6. Conclusions.- Thin-Layer Distributed Piezoelectric Neurons and Muscles: Electromechanics and Applications.- 1. Introduction.- 2. Distributed Neural Sensation.- 3. Distributed Muscle Actuation.- 4. Case-1: A Hemispherical Shell.- 5. Case-2: A Cylinder with Distributed Neurons and Muscles.- 6. Case-3: Distributed Convolving Ring Sensors.- 7. Case-4: Segmentation of Distributed Sensors/Actuators.- 8. Summary and Conclusions.- • Appendix: Mechanical Forces and Moments.- Optical Fiber Sensors and Systems.- 1. Introduction.- 2. Basics Fiber Optics.- 3. Fiber Optics in Industry and Robotics.- 4. Optical Fiber Sensors for Robots.- 5. Fiber Optic Lighting and Imaging Systems in Machine Vision.- 6. Conclusions and Future Trends.- Design and Dexterous Control of Micromanipulator with Multiple Degrees of Freedom.- 1. Introduction.- 2. Dexterous Teleoperation Control.- 3. Design of Micromanipulator with Multiple Degrees of Freedom.- 4. Conclusions.- A Three Degrees of Freedom Micro-Motion In-Parallel Actuated Manipulator.- 1. Introduction.- 2. Kinematics.- 3. Prototype Micro-Motion Manipulator.- 4. Special Configuration.- 5. Conclusion.- A Miniature Mobile Robot Using Piezo Elements.- 1. Introduction.- 2. A Miniature Mobile Robot Using Piezo Vibration for Mobility in a Thin Tube.- 3. A Wireless Mobile Robot Driven by Piezo Vibration in a Thin Tube.- 4. A Miniature Mobile Robot for Use on a Wire.- 5. A Miniature Actuator for Plate Movement.- 6. Other Miniature Mobile Robots Using Piezo Elements.- 7. Conclusion.- Distributed Piezoelectric Transducers Applied to Identification, Control, and Micro-Isolation.- 1. Introduction.- 2. Piezoelectricity Theory.- 3. Distributed StructuralIdentification Theory.- 4. Distributed Vibration Control Theory.- 5. Case Studies.- 6. Summary and Conclusions.