Description
Microsystems Dynamics, 2011
Intelligent Systems, Control and Automation: Science and Engineering Series, Vol. 44
Authors: Ostasevicius Vytautas, Dauksevicius Rolanas
Language: EnglishSubject for Microsystems Dynamics:
105.49 €
In Print (Delivery period: 15 days).
Add to cart the book of Ostasevicius Vytautas, Dauksevicius RolanasPublication date: 01-2013
214 p. · 15.5x23.5 cm · Paperback
105.49 €
In Print (Delivery period: 15 days).
Add to cart the book of Ostasevicius Vytautas, Dauksevicius RolanasPublication date: 11-2010
214 p. · 15.5x23.5 cm · Hardback
Description
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Foreword.- Preface.- Introduction to Microsystems.- Fabrication Technologies of Microsystems.- Overview.- Nickel Surface Micromachining Technology for Fabrication of Microswitches.- UV Lithography for Fabrication of Micromotors.- Common MEMS Actuators.- Parallel Plate Capacitors.- Comb Drives.- Electrostatic Micromotors.- Electrostatic Microswitches.- Theoretical Background of Multiphysical Interactions Common in Microsystems.- Introduction to Coupled-Field Modeling.- Electrostatic Actuation and Pull-in Instability.- Viscous Air Damping.- Vibro-Impact Interactions.- Experimental Testing of Microsystem Dynamics.- Vibration Excitation Methods.- Optical Techniques for Measurement of Vibrations of Microstructures.- Study of Elastic Vibro-Impact Macrosystems and Microsystems.- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact.- Macrosystems.- .- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator.- Numerical Modeling and Analysis of Fluidic-Structural Interaction.- Numerical Modeling and Analysis of Electrostatic-Structural Interaction.- Numerical Modeling and Analysis of Vibro-Impact Interaction.- Numerical Analysis of the Micromotor.- Finite Element Modeling of Micromotor.- Modal Analysis.- Micromotor Control.- Analytical Model of a Micromotor.- Basics of Micromotor Geometry.- Torque Analysis.- Micromotor Design Guidelines.- References.