Description
Handbook of Thin Film Process Technology
98/2 Recipes for Optical Materials
Author: Glocker D
Language: English
Subjects for Handbook of Thin Film Process Technology:
Keywords
Thin Film Process Technology; Magnetron; Magnetron Sputtering; sputtering; Dense; deposition; RF Magnetron Sputtering; rate; Substrate Temperature; refractive; Deposition Rate; index; Refractive Index; ion; DWDM Filter; beam; High Speed Fixture; sputter; Narrow Band Pass Filter; mass; Ion Beam Sources; A Hirata Gustavo; Transmission Peak; A Glocker David; ITO; DWDM; Low Index Materials; Shadow Masks; Telecommunication; Assist Source; Coating Uniformity; Stylus Profilometer; MgO Thin Film; Metal Targets; Monoclinic; Carrier Concentration
Publication date: 12-2017
· 21x29.7 cm · Hardback
· 21x29.7 cm · Hardback
Description
/li>Contents
/li>
The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.
1. Physical Depositon Techniques 2. Chemical Depositon Techniques 3. Processing Technologies 4. Real-Time Diagnostics 5. Surface Modification in Vacuum 6. Superlattices and Multi-Layered Structures 7. Materials
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